Phantasm and Hellraiser.
Phantasm introduced the Tall Man and the Silver Ball of DEATH. In sequels it got more elaborate plus the killer gnomes in little monk robes that wouldn't die because they were dead. Also, you had that other dimension factor in it.
Hellraiser gave us Pinhead and the Cenobites plus a puzzle box. Not to mention people ripping off skin to wear the skin. Sequels gave us a Cenobite with a camera rocket launcher eye, the world the Cenobites come from with a "Doctor is in" line and the fact that you can kill Pinhead but he will always come back, puzzle or not.
